摘要
对去离子水中N型硅的微细电火花加工工艺进行了实验研究,分别在加工效率、电极损耗、表面粗糙度等方面与煤油工作液中N型硅的加工进行了对比。通过大量的实验研究得出:在相同的电参数下,与煤油工作液中加工实验相比,以去离子水为工作液介质时微细电火花加工N型硅的加工效率更高,其工件表面粗糙度值基本相当,且其放电加工过程非常稳定,可知微细电火花加工N型硅时,去离子水是一种较好的工作液介质。
The experiments of n-doped silicon micro-EDM in demonized water have been carried out. The roaching speed, the wear of the electrode roughness in demonized water are compared with those in kerosene. The experimental results show that the roaching speed of n-doped silicon microEDM in demonized water is higher than in kerosene, and the wear of the electrode is also higher, and roughness is almost the same. Demonized water is a kind of better dielectric fluid.
出处
《电加工与模具》
2005年第5期5-8,共4页
Electromachining & Mould
