摘要
针对液态金属离子源的发射系统属于轴对称系统的特点,采用动态喷流柱模型,利用模拟电荷法对液态金属离子源发射系统的电场进行了计算,结果表明,该方法计算精度高,非常适合于电子束、离子束系统发射极附近电场的计算。
According to the characteristic of the axial symmetry of the liquid metal ion source emitting system, the electric field of the system is calculated by using the dynamic protrusion model and charge simulation method. The calculation result indicates that this method has very high calculation precision and fits to calculate emitting poles＇ electric field of electron beam and ion beam system.
出处
《微细加工技术》
EI
2005年第3期20-26,共7页
Microfabrication Technology
关键词
液态金属离子源
模拟电荷法
发射系统
动态喷流柱
liquid metal ion source
charge simulation method
emitting system
dynamic protrusion
