摘要
针对MOCVD系统工艺及控制要求,设计了MOCVD控制系统。采用PLC作为核心控制器,负责各类输入输出信号的控制,进行数据处理,控制半导体材料生长。同时采用W inCC组态软件设计上位监控系统。经过近一年运行,MOCVD控制系统运行状况良好,控制系统具有高可靠性、抗干扰能力强、控制精度高等特点,满足系统控制要求,保证了材料生长顺利进行。
According to the characteristics and requirements of MOCVD system, MOCVD control system is presented. MOCVD control system includes Siemens PLC and SCADA system. The PLC system deals with data acquisition, data processing, and the control of output signals, while the visual SCADA system is designed by using WinCC software. Both simulation and practical application results show there are much better performances such as reliability, anti-jamming, precision etc, which meet the requirements of MOCVD system and insure material growth.
出处
《陕西理工学院学报（自然科学版）》
2005年第3期28-32,共5页
Journal of Shananxi University of Technology:Natural Science Edition
基金
陕西省自然基金资助项目(2004F29)
陕西省科学技术研究计划项目(2004K05-G1)
