摘要
介绍了纳米薄膜的分类以及纳米薄膜的光学、力学、电磁学与气敏特性;综述了现有的溶胶鄄凝胶法、LB鄄膜法、电化学沉积法、化学汽相沉积、低能团簇束沉积法、真空蒸发法、溅射沉积、分子与原子束外延、分子自组装等纳米薄膜制备技术;概括了纳米薄膜的应用。
The classification and the optical, mechanical, electro-magnetical, and gas-sensitive properties of nano-membranes are introduced. Some current methods to produce nano-membranes, such as, sol-gel method, L-B membrane method, electro-chemical deposit, chemical vapor deposition, low-energy cluster beam evaporation, vacuum evaporation, spatter deposition, molecular or atomic beam epitaxy and molecular self-organization, are reviewed. Applications of nano-membranes are summarized.
出处
《微纳电子技术》
CAS
2005年第11期506-510,共5页
Micronanoelectronic Technology
关键词
纳米薄膜
特性
制备方法
应用
nano-membranes
properties
preparation method
application
