摘要
介绍了原子力显微镜(AFM)的原理及特点。用AFM对光盘上记录信息用的凹坑结构进行了三维检测,并对测量结果进行了分析。结论表明AFM在光盘质量检测过程中具有独特的优势。
The paper introduces the principle and characteristic of atomic force microscope （AFM）. It is used to three-dimensional detect pit structure on optical disk, and analyzed measure results. The obtained results demonstrate the AFM have particular advantages in detecting the quality of optical disk.
出处
《光学仪器》
2005年第5期3-6,共4页
Optical Instruments
