摘要
综述了国内外TiO_2气体传感器的发展状况、工作原理以及不同类型的TiO_2传感器。徽电子加工技术和薄膜技术的引人,为实现气体传感器小型化、集成化、高灵敏度化提供了重要手段。
The development of titanium dioxide gas sensors and the principle of working and the different types of titanium dioxide gas sensors have been commented in this paper. The miniature and as-semblage and high sensitivity of gas sensors have been provided many important methods by the introduc-tion of microelectricity and film technology .
出处
《材料工程》
EI
CAS
CSCD
北大核心
1996年第5期24-26,共3页
Journal of Materials Engineering
