摘要
本文简述了微机电系统(MEMS)在各领域的广泛应用,以物理学观点出发分析研究了MEMS器件设计中互相关联的多物理场耦合问题.指出新技术学科存在于物理学发展本身,物理学是MEMS和许多交叉科学发展的坚实基础.
This paper expounded widespread use of MEMS device in many fields. With the viewpoint of the physics it analyzes and describes many questions relating to the physics effect coupling fields in MEMS designing. It points that the physics is the hard foundation to MEMS and many crossed subjects studying.
出处
《物理与工程》
2005年第5期39-41,50,共4页
Physics and Engineering
