摘要
形貌影栅云纹测量中主要有4种光场:平行照射-平行观察、平行照射-点观察、等距点照射-点观察和不等距点照射-点观察光场.光场的选择与布置直接影响测量结果中系统误差的大小.为此通过对上述4种光场的特点进行分析比较,给出了通常采用的光场参数下的误差分析.分析结果表明,平行照射-平行观察光场是影栅云纹法中的基本光场,其他光场均受非平行光因素的影响,不可避免地引入误差.本研究对采用影栅云纹法进行测量时,合理选择光场和光场参数以及对测量结果的误差评估都有重要的指导作用.
In shadow moiré topography, there are theoretically four main kinds of optical field arrangements as parallel illumination and parallel receiving, parallel illumination and point receiving, point illumination and point receiving with equal distance, point illumination and point receiving with unequal distance. The optical field arrangement is very important to one experiment because it is the main influencing factor for inducing initial system error. So the characteristics of these four groups of optical field arrangements are compared and the corresponding error analysis is made. It can be concluded that the parallel illumination and parallel receiving arrangement is the basic one of the shadow moir6 method and that other arrangements could inevitably produce errors because of the effect of non-parallel factor. The work is helpful to rationally choose optical field arrangement and evaluate the error in shadow moiré experiments.
出处
《大连理工大学学报》
EI
CAS
CSCD
北大核心
2005年第6期781-784,共4页
Journal of Dalian University of Technology
关键词
影栅云纹法
形貌重建
误差分析
shadow moiré method
topography reconstruction
error analysis
