摘要
采用溶胶-凝胶技术,使用旋涂方法在K9玻璃和单晶硅片上制备各种光学薄膜,并用紫外光源作为高能光子源辐照溶胶-凝胶光学薄膜。使用扫描电镜(SEM)、原子力显微镜(AFM)、椭偏仪、铅笔硬度仪等测量和分析薄膜的特性。用输出波长1 064 nm、脉宽15 ns电光调Q激光系统测试薄膜的激光损伤阈值。结果表明,紫外光辐照可提高薄膜折射率和机械性能。采用紫外预处理还能将节瘤缺陷转换成孔洞缺陷,从而有效提高薄膜的激光损伤阈值,其中,单层ZrO2薄膜的激光损伤阈值达到50.6 J/cm2(1 064 nm,1 ns)。与当前流行的激光预处理技术相比,紫外预处理的设备简单、易于操作。溶胶-凝胶多层膜经紫外光处理后,有效提高了多层膜膜层的均匀性。
Sol-gel optical films were deposited on K9 glass and silicon wafer substrates by spin-coating method and a high-pressure mercury lamp was used to perform ultraviolet treating to solidify these films and improve their performance. SEM, AFM, IR and ellipsometer were used to characterize the structure and optical properties of the films. Mechanical property of films was measured by pencil hardness-testing device. Laser damage threshold of films was measured by a Q-switched Nd： YAG high power laser with the wave length of 1 064 nm and the pulse width of 15 ns. The results show that UV-irradiation can improve the mechanical property and increase the refractive index of the films. Besides, the nodules on the surface of the films can be changed into pits by UV-irradiation process, so the laser damage threshold of sol-gel thin films will be increased. After UV-irradiation reached 50.6 J/cm^2 method to avoid the the multilayer films （1064 nm, infiltrating the laser damage threshold oi single-layer ZrO2 film 1 ns）. It is found that UV-irradiation is an effective between the layers, and the degree of homogeneity of can be improved by this way.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2005年第6期507-512,共6页
Atomic Energy Science and Technology
基金
国家自然科学基金重点基金资助项目(20133040
69978017)
国家"863"计划资助课题(2002AA842052)
上海市重点学科建设项目资助课题
上海市科委中法合作项目(02SL001)
教育部跨世纪优秀人才资助计划资助课题
