摘要
二氧化钛(TiO2)是响应三甲胺(TMA)气体的最佳金属氧化物半导体材料。为保持TiO2基旁热式气敏器件具有较高灵敏度、热稳定性和较低器件空气阻值(Ra),用X射线衍射和参数测试等方法,对TiO2基质样品进行分析,结果得出,在1050℃下退火1h,使TiO2晶型转变为最稳定的金红石结构;N2气氛下高温处理,由于缺陷能级引入载流子数目增加,而提高了材料电导率水平。
TiO2 is the best metal-oxide-semiconductor material responsed to trimethylamine （TMA） . In order to keep TiO2-based indirect heating gas-sensing element with higher sensitivity, thermal stability and lower resistance （Ra） in the air, X-ray diffraction and parameter testing are applied to analyze the TiO2-based sample. The results suggest that TiO2 crystallographic form will change to the best stable rutile structure if annealing 1 h at 1050 ℃. And the electric conductivity of the material is improved by high temperature processing in N2, with the increasing number of current carrier led in by defective energy level.
出处
《微纳电子技术》
CAS
2005年第12期558-560,570,共4页
Micronanoelectronic Technology
关键词
二氧化钛
晶型转变
低阻化
TiO2
crystallographic form transformation
low resistivity
