摘要
采用层状介质中波的传播分析法对一种在ST-90°X切割的石英基底上覆盖重金属膜激发的一种新型纯剪切(SH)波的传播特性进行了分析,并得到了传播速度、机电耦合系数与金属膜厚和传播方向的关系以及位移分量分布曲线。这种波只有纯剪切运动,位移分量只有剪切分量,具有较大的机电耦合系数和反射系数,而且具有良好的频率温度特性,因此对于实现声表面波器件的小型化有着很大的使用价值,另外这种模式波对于液体传感器的研究应用也相当有意义。
A new type of shear horizontal wave which excited by composing a heavy metal film on an ST cut 90° X propagation （direction perpendicular to X-axis） quartz substrate was analyzed by the methods of elastic wave propagation in thin layers, and the dependence of SAW velocities and electromechanical coupling factors on normalized thickness of various metal film were acquired. This wave has only pure SH particle motion, and has only an SH component （Uz displacement）. Because of its excellent temperature characteristic, large electromechanical coupling factors （k2=0.28%-0.34%） and large reflection coefficient at reflector electrodes, this wave is very useful for realizing a small-sized SAW devices and liquid sensor applications.
出处
《压电与声光》
CSCD
北大核心
2005年第6期708-710,713,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(10374100)
