摘要
介绍了一种 MEMS 差动电容加速度传感器的设计及所达到的技术指标。对 MEMS Sensor 选择差动电容传感器的理论依据进行了分析,叙述了 MEMS 差动电容加速度传感器各项参数的设计依据,包括灵敏度、非线性、温度漂移、隔离度、频带宽度等,同时介绍了该传感器各项指标的测试数据。该传感器具有灵敏度高、参数设计合理,不用温度和线性补偿就达到了高线性和低漂移,结构合理,达到理想的横向隔离效果和宽的频率响应特性等特点。
Introduced a design of differential MEMS capacitive acceleration sensor of oil exploration as well as already reached technical index. Analysised why MEMS sensor select the differential capacitive acceleration, introduced the design according of differential MEMS capacitive acceleration sensor. This sensor have high sensitivity, rational parameter, high linearity and low excursion not need to be equalized of temperature and linearity, it have fine structure, perfect landscape orientation partition and fine frequency response.
出处
《仪表技术与传感器》
CSCD
北大核心
2005年第12期8-9,15,共3页
Instrument Technique and Sensor
基金
国家"八六三"项目(2004AA404210)
