摘要
介绍了ICP(感应耦合等离子体)C类射频振荡器的设计和调试结果。低温等离子体的应用已经非常广泛。以感应耦合方式将射频能量送入中性气体中激发等离子体,已经成为重要的等离子体源类型之一。传统的功率射频发生器大多使用电子管,体积大,也比较笨重。在射频发生器和等离子体装置之间需要设置射频传输线和匹配箱。以M O SFET代替传统的电子管作为有源器件组成的振荡器,体积很小,可以与等离子体源直接连接,省去了射频传输线和传输线终端的匹配箱。振荡器的频率为13.56 MH z,输出功率为200 W。试验结果达到了设计要求。
RF transmitter used for a ICP （Inductive Coupled Plasma）is introduced. Low temperature plasma has been applied widely. Plasma produced with RF energy by means of inductive coupling,is an important type of plasma source. A vaccum tube is used in the most tranditional design of RF transmitter. This kind of transmitter is large in size and heavy in weight,so that a transmission line and a matching box are needed. A MOSFET instead of a vacuum tube is used in the oscillator introduced here. The transmitter is small in size so that it can be connected to the plasma sourse directly and the transmission line and the matching box at the end of the transmission line are not necessary. The frequency of the transmitter is 13.56 MHz and the output power is 200 W. Experiment result verifies the design.
出处
《现代电子技术》
2005年第24期1-2,4,共3页
Modern Electronics Technique
