摘要
为提高Z轴硅微机械陀螺仪信噪比,分析了陀螺仪机电接口中的电容和电阻。文中以Z轴硅微机械陀螺仪的理论模型为对象,建立了陀螺仪机电接口模型,分析了模型中寄生电容和电阻对有用信号和噪声的影响。分析结果表明:寄生电容会削弱有用信号,且布线与活动结构间的电容对输出有很大的影响,而寄生电阻会产生噪声。最后,提出了采用新工艺和合理的布线方法以减小寄生电容和电阻,从而提高信噪比。
The capacitances and resistances of electromechanical interface of SMG are analyzed in order to increase the Signal Noise Ratio（SNR）. The electromechanical interface model of the structure of Z-input silicon micromachined gyroscope is established. The impacts of these parasitic capacitances and resistances on output signal are analyzed and simulated with the simulation software of circuit. The analytic results indicate that the parasitic capacitances decrease the output signal and disposal wires on the substrate have made great impact on output signal, and the resistances cause output noise. At last, some methods are put forward to decrease the parasitic capacitances and the resistances, which are the adoption of SOI craftwork and reasonable disposal wires.
出处
《中国惯性技术学报》
EI
CSCD
2005年第6期90-94,共5页
Journal of Chinese Inertial Technology
关键词
硅微机械陀螺仪
机电接口模型
寄生电容
电阻
信噪比
silicon micromachined gyroscopes（SMG）
electromechanical interface model
parasiticcapacitance
resistance
SNR
