摘要
能动磨盘加工(CCAL)与数控加工(CCOS)是大型非球面主镜加工有别于经典加工的两种新型加工工艺,针对这两种主镜加工工具,建立了各自的加工去除函数模型,从理论上分析了两者的加工特性,并在直径1300 mm非球面主镜加工实验的基础上,根据主镜面形ZYGO干涉仪和哈特曼-夏克(Hartmann-Shack)传感仪的检测数据,利用功率谱密度(PSD)和相位梯度进一步探讨了这两种加工工艺对主镜面形中高频差的影响,提出了将能动磨盘加工与数控加工相结合的主镜加工工艺方法。
Computer control active-lap （CCAL） and computer control optical surface （CCOS） are two new manufacturing technologies which are different from the classical manufacturing technology for large aspheric mirrors manufacturing, the manufacturing removal function models are found respectively aimed at these two manufacturing tools, and the manufacturing features are analyzed from the viewpoint of theory. CCOS possesses the ability of partly grind and polish, but tends to generate mid- and high-spatial frequencies error; CCAL can control the mid, and high spatial frequencies error effectively, but has nothing for aperture grind and polish. The mid- and high-spatial frequencies error generated by these two manufacturing technologies are further discussed by the methods of power spectral density （PSD） and phase gradient based on the mirror testing data from ZYGO interferometer and Hartmann-Shack wavefront sensor during the experiment of diameter of 1300 mm aspheric mirror manufacture. A new manufacturing technology for large aspheric mirrors combining the technologies of the CCAL and CCOS is proposed.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2006年第1期128-132,共5页
Chinese Journal of Lasers
关键词
光学设计
能动磨盘
能动磨盘加工
数控加工
功率谱密度
optical design
active-lap
computer control active lap
computer control optical surface
power spectral density
