摘要
氧化铟锡(ITO)膜的电阻率及表面粗糙度将影响有机电致发光器件(OLED)的发光效率及其使用寿命。通过选择适当的工艺条件以及表面处理可以改善ITO膜的表面粗糙度、可见光透过率、电导率和功函数,以提高OLED的稳定性、发光效率和使用寿命。对薄膜的光学和电学性能进行了分析,提出了改进工艺的方向。
The resistivity and surface roughness of Indium tin oxide (ITO) films will affect the light-emitting efficiency and lifetime of the organic light-emitting diodes(OLED) . Through the selection of processing parameters and surface modification, it is possible to improve the surface roughness, light transmission, conductivity and work function of ITO films, to improve to the stability, light-emitting efficiency and lifetime of OLED.
出处
《真空与低温》
2005年第4期187-193,共7页
Vacuum and Cryogenics
基金
国家863课题资助(编号:2004AA303540)