摘要
利用光声技术对激光气相沉积的纳米硅进行了红外光声光谱的研究，考察了红外光声谱随退火处理和外加压力的变化行为，给出了纳米硅红外吸收峰的指认和解释，讨论了固态效应对吸收峰位置的影响．
Infrared photo -acoustic spectra (IR-PAS) of the nanosized silicon synthesized by laser-induced chemical vapor deposition were studied by use of photo-acoustic spectroscopy. The influence of annealing treatment and compression on the IR-PAS absorption peaks of the nanosized silicon is investigated. The IR absorption peaks are assigned and the interpretation is presented. The influence of solid state effect on the absorption peak is discussed.
出处
《华南师范大学学报（自然科学版）》
CAS
1996年第1期28-34,共7页
Journal of South China Normal University(Natural Science Edition)
基金
广东省自然科学基金
省高教厅重点扶持学科基金
省博士后基金
关键词
红外光谱
光声光谱
纳米硅
激光合成
半导体
硅
infrared spectrum
photo -acoustic spectroscopy
nanosized silicon
laser- induced chemical vapor deposition
