摘要
介绍了以Ｌｉ２Ｂ４Ｏ７为基片，１５０ＭＨｚ声表面波窄带滤波器的设计与制作。在设计中采用了波导耦合谐振器的结构形式，按新研究的光刻腐蚀方法［１］，成功地制作出了１５０ＭＨｚ的窄带滤波器。验证了波导耦合谐振滤波的理论．证实了Ｌｉ２Ｂ４Ｏ７确实是较好的声表面波基片材料。
in this paper the design and fabrication of 150 MHz SAWF on Li2B4O7 crystal substrate are introduced.The structure of waveguide-coupled resonator filter is adopted in the design.A narrow bandpass 150 MHz SAW filter has been fabricated on Li2B4O7 crystal substrate by a newmethod of photoeching.The measured results of the filter verified that the Li2B4O7 crystal is trulya good SAW substrate material.
出处
《压电与声光》
CSCD
北大核心
1996年第4期231-234,共4页
Piezoelectrics & Acoustooptics
基金
北京市自然基金
关键词
声表面波滤波器
波导
耦合谐振滤波器
SAW filter
lithium tetraborate
waveguide-coupled resonator filter
