期刊文献+

退火处理对氧化锌薄膜的特性影响

Effect on ZnO Film From the Annealing Temperatures
下载PDF
导出
摘要 用脉冲激光沉积法(PLD)制备氧化锌薄膜,600℃进行退火处理,分别从XRD衍射谱、原子力显微镜(AFM)照片及光致发光等方面对薄膜结构等进行研究并探讨退火处理对薄膜的影响. ZnO film has been fabricated by the pulsed laser deposition (PLD) technique ,the PLD samples were annealed at 600℃. The structure of the film and effect from the annealing temperatures were studied by X-ray diffraction (XRD),AFM and photolum inescence (PL).
出处 《咸宁学院学报》 2005年第6期31-33,48,共4页 Journal of Xianning University
关键词 ZNO薄膜 PLD 退火处理 ZnO film PLD Anneale
  • 相关文献

参考文献9

  • 1TANG Z K,WONG G K L,YU P..Room-temperature ultraviolet laser emission from self-assembled ZnO microcry stallite thin films[ J ].Appl.Phys.Lett.,1998,(72):3 270 ~ 3 272.
  • 2童林夙.显示器件的现况与展望[J].光电子技术,2001,21(1):1-16. 被引量:10
  • 3Li B.S.Liu Y.C.ShenD.Z.Y.et al.Effectsof RF power onproperties of ZnO thin films grownon Si(001) substrate by plasma enhanced chemical vapor deposition[ J ].J.Crys.Growth,2003,249:179 ~ 185.
  • 4PalB.Sharon M.Enhanced photo catalytic activity of highlyporous ZnO films prepared by sol-gelprocess[ J ].Mater.Chem.phys,2002,76 (1):82 ~87.
  • 5Gruber D.,Kraus F.,MullerJ..Anovel gassensor design based on CH4/H2/H2O plasmaetched ZnO thin films[ J ].Sensorsand Actuators B.,2003,92(1 -2):81 ~89.
  • 6Song D.Y.,Neuhaus D.H.,Xia J.,et al.Structure and Charac-teristics of ZnO:Al/n-Si heterojunctionsprepared by mag-netronssputtering[ J ].ThinSolid Films,2002,422 (1 -2):180 ~ 185.
  • 7Nakata Y.,Okada T.,Maeda M..Deposition of ZnO film by pulsed laser deposition atroom temperature[ J ].Appl.Surf.Sci,2002,198:363 ~370.
  • 8LIN C.H.CHIOU B.S.CHANGA C.H.et al.Preparation and cathodolumine scence of ZnO phosphor[ J ].Materials Chemistry and Physics,2002,77:647 ~ 654.
  • 9XU X.L.GUO C.X.QI Z.M.,et al.Annealing effect for surface morphology and luminescence of ZnO film on silicon[ J ].Chemical Physics Letters,2002,364:57-63.

二级参考文献3

  • 1[1]"Television System",Stanford Resources Inc 1998:73~p88
  • 2[2]J A Castallano.SID′99 Digest,1999:356
  • 3[3]E mentlyy disphay market develoment and perspective seminar M-1 SID'OO

共引文献9

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部