摘要
用1.06μm连续激光辐照TiO2/S iO2薄膜元件,在不同强度下测量了激光辐照TiO2/S iO2薄膜元件引起反射信号幅度随时间的变化,并观察到薄膜从基体材料表面起泡、膜层脱落的现象。研究结果表明,TiO2/S iO2薄膜的反射光信号变化是连续激光辐照薄膜元件产生的热效应引起的;在激光辐照过程中,薄膜元件基体材料产生的热变形差别是基体起泡、脱落的主要原因。
When TiO2/SiO2 film is irradiated by difterent 1.06p.m CW-Nd：YAG laser radiation, the time history of the signal reflected from the TiO2/SiO2 film is measured till a number of foam and pull-off phenomenon on the TiO2/SiO2 film surface is observed. The test results indicate the variation of the reflected signal is caused by thermal effect due to laser irradiation and during the laser irradiation,the difference of thermal deformation of the TiO/SiO2 film and substrate is the main cause of the foam and pull-off phenomenon.
出处
《激光技术》
CAS
CSCD
北大核心
2006年第1期76-77,81,共3页
Laser Technology
关键词
连续激光
薄膜
热效应
损伤效应
CW laser
thin film
thermal effect
damage effect
