摘要
采用单晶提拉炉成功生长出200mm×180mm大尺寸A l2O3晶体。探讨了晶体生长工艺参数和晶体开裂之间的关系,并讨论了晶体中的热应力、热应变、温度梯度、提拉速度之间的关系,分析了影响晶体质量主要是晶体开裂的原因,设计出生长大尺寸A l2O3晶体的最佳工艺条件。
A large size Al2O3 single crystal was grown by using Kyropouls method in monocrystal furnace. The relationship between the crystal crack and growth parameter was investigated and the relationships among the thermal stress, thermal strain, temperature gradient and pulling rate were also discussed. The crystal growth procedure was optimized.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2006年第1期201-205,共5页
Journal of Synthetic Crystals
基金
国家科技攻关项目(浙江省科技厅2001BA321C)
关键词
大直径Al2O3
晶体
温度梯度
晶体开裂
large size Al2O3 single crystal
temperature gradient
crystal cracking
