摘要
建立了多极板电容传感器的三维有限元仿真数学模型,运用AN SY S软件对不同结构的传感器进行了三维仿真计算,比较分析了无屏蔽电极、UM IST型和M ETC型三种结构的电容传感器中检测极板间的电位分布,研究了屏蔽电极长度M ETC型电容传感器检测极板间电位分布的影响。计算了极板内置式和外置式电容传感器的满管、空管电容及其变化量。仿真研究结果为多极板电容传感器的结构设计提供了理论依据。
A three-dimensional finite element model for the multi-electrode capacitance sensor is developed. A simulation study of different structures of capacitance sensors has been carried out using ANSYS software. Voltage distributions in the central axial sections of three capacitance sensors （UMIST,METC and sensors without axial screen）are calculated and analyzed. The effect of axial screen length on the voltage distributions in the sensor＇s section is studied. Based on the three-dimensional model,the capacitance values of a full-pipe,an emptypipe and their varieties are calculated. The characteristics of two types of capacitance sensors with external electrodes and internal electrodes are analyzed and compared. The results of the simulation and the analysis are the important elements in the design of capacitance sensors.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2006年第3期280-284,共5页
Chinese Journal of Scientific Instrument
基金
国家863计划专项基金(2002AA616050)资助项目
