摘要
探讨了利用普通光谱型椭偏仪对各向异性液晶层进行综合性测量的可行性.并利用法国Jobin Yvon公司的UVISELSPME(Spectroscopic Phase Modulated Ellipsometer)光谱型椭偏仪测量了光学各向异性液晶层的折射率no和ne及液晶层厚d,进一步利用椭偏仪在透射方式下测量了平行排列液晶层的光延迟特性Δnd,二者取得了很好的一致性,说明利用光谱型椭偏仪可以实现对光学单轴性液晶层及其他材料的测量,测厚精度为纳米量级.
Spectroscopic ellipsometry is widely used in measuring the refractive index and thickness of optical isotropic thin layers. A simple method using spectroscopic ellipsometry to measure uniaxial liquid crystal layer is introduced. A UVISEL spectroscopic phase modulated ellipsometer is used to measure the ordinary refractive index, extraordinary refractive index and thickness of the liquid crystal layer in a parallel-aligned liquid crystal cell. The phase retardation And is measured in transmission mode. The results show that the spectroscopic ellipsometry can be used to measure the anisotropic mulfilayer liquid crystal cell with high precision.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2006年第3期1055-1060,共6页
Acta Physica Sinica
基金
国家自然科学基金(批准号:60277033
50473040
19974046
59973020)
吉林省科委基金(批准号:20020603)资助的课题.~~
关键词
光谱型椭偏仪
各向异性
折射率
相位延迟
spectroscopic ellipsometry, anisotropy, refractive index, phase retardation
