摘要
黄点是ZnS-SiO2陶瓷靶材中常见的缺陷。从减少ZnS粉末原料中存在的微量杂质入手,对黄点缺陷产生的原因和消除措施进行了探索。结果表明,原料ZnS粉末中残存的单质S和SO42-是产生黄点的主要原因,采用高温烘烤的措施,可以大幅度降低S和SO42-的含量,从而达到减少甚至消除黄点缺陷的目的。酸洗可以降低以Fe为主的金属杂质的含量,但不宜在生产中采用。
Yellow spots are a kind of common defects in the production of ZnS - SiO2 ceramic target. This paper probes into the causes of the yellow spots and the methods of how to avoid from them studying the impurities of ZnS powder. The result shows, the main cause of the yeUow spots appeared is pure S and SO4^2- remained in the ZnS powder materials. Adopting to roast the raw material under high temperature can greatly reduce pure S and SO4^2- content to reach the goal of reducing or avoiding the yellow spots. To clean with acid can reduce the content of metal impurities, such as Fe, but should not be adopted in producing.
出处
《陕西理工学院学报（自然科学版）》
2006年第1期14-16,26,共4页
Journal of Shananxi University of Technology:Natural Science Edition
