摘要
探索研究了用于构制以硅为基体材料、具有特定三维微结构的微电流型电化学气体传感器的微加工工艺，提出了双面光刻、高硼掺杂腐蚀止停、化学各向异性刻蚀和硅表面多层膜剥离成形等既实用而又相容的硅微机械加工关键技术。如此构制的微电流型电化学气体传感器，在器件结构、检测灵敏度、电流响应的稳定重现性等方面，与用传统工艺制成的常规电流型气体传感器相比，具有独特的优点。
The silicon micromachining techniques as a means of mass fabricating microelectrochemical amperometric gas sensor devices on silicon substrate were explored, and the key micromechanical processing techniques compatible with each other were presented. A body-integrated microamperometric sensor device was built up in a silicon integrated electrochemical microcell, The device's performance for direct microamperometric determination of CO2 concentration inthe gas phase was evaluated and compared to that of conventional amperometric gas sensor devices. Such new devices with specific silicon microstructures are not only excellent in characteristics but also low in cost as a result of batch fabrication. There is tremendous potential for further growth.
出处
《传感器技术》
CSCD
1996年第5期20-23,共4页
Journal of Transducer Technology
基金
中国科学院传感技术国家重点实验室资助
关键词
微电流型
电化学
气体传感器
薄膜微电极
硅
Microelectrochemical amperometric gas sensor devices
Thin-film microelectrode
Silicon integrated electrochemical microcell
Silicon micromachining techniques
