摘要
场限制环作为一种可与许多器件工艺相容的ＰＮ结终端得到了广泛应用。存在的一个问题是其效果随结构参数有过分敏感的变化。文中认为：作为设计指导思想的最佳环距原则是加重这一敏感性的重要原因。作为改进，提出了新的安全环距设计原则。按安全环距原则设计，除可明显缓解终端效果随结构参数敏感变化的问题外，还可有效地提高在同样结构和工艺条件下所制成器件的额定电压。
The field limitting ring(FLR),behaved as a compatible planar junction termination, has been widely used in many high voltage devices. An existing problem is the extra sensitive dependence of its result on device structural parameters.This paper recognizes that the optimum design rule of FLR is one of the important reason of enhancing the sensitivity.A new design principle, the safety rule of design, is suggested to instead the optimum rule.The result of the new rule shows that the extra sensittivity is greatly alleviated,and the maximum voltage rating can be raised significantly,while the process conditions are same.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1996年第3期216-220,共5页
Research & Progress of SSE
关键词
场限制环
安全环距
PN结
半导体物理
Field Limitting Ring
Planar Junction Termination
Optimum Ring Spacing
Safety Ring Spacing
