摘要
研究了基于莫尔条纹的三维轮廓测量技术的光学成像原理。以余弦光栅作为投影光栅和参考光栅,对投影型莫尔法从物理光学的角度进行了理论分析。采用菲涅耳衍射公式和傅里叶变换得出了输出面上的光场的理想计算公式。在计算机上采用描点法模拟出变形光栅的光强分布,该光强分布为余弦函数,与实验图片的结果一致,还得出了最终变形光栅像的光强分布。与从几何光学的角度分析结果相比,物理意义更明确。利用上述结果推导出了莫尔条纹的光强分布函数,同时也推出了高度和相位的关系。该结果为基于莫尔条纹的三维轮廓测量技术提供了理论基础。
The imaging theory of three-dimensional profilometry measurement based on moiré stripe is studied in the paper. The cosine grating is taken as the projected grating and the referenced grating; the projection moiré method is analyzed by the physical optics. The Fresnel diffraction formula and the Fourier transforms are used to get the intensity distribution formula. The light intensity distribution of the deformed grating is simulated on computer by depicting. The light intensity distribution is the cosine function, which accords with the image of the experiment. The light intensity distribution of the image of deformed grating is got. The light intensity distribution function of moiré stripe is deduced. And the relation between the phase and height is obtained. The method can be used in the three-dimensional profiloraetry measurement based on moiré stripe.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2006年第4期521-525,共5页
Chinese Journal of Lasers
关键词
信息光学
莫尔条纹
三维形貌测量
傅里叶变换
余弦光栅
成像投影
information optics
moiré
stripe
3D profilometry measurement
Fourier transforms
cosine grating
projection
