摘要
超精密气浮工件台系统是当前主流光刻机中的核心子系统,要求具有纳米级的重复定位精度和同步运动精度。这种系统所采用的气浮轴承如果设计不当,会导致系统发生微幅振动,从而影响系统精度。文章通过分析微振动的成因和影响因素,提出了相应的抑制措施,保障了超精密气浮工件台系统的精度实现。
Stage system is one of the most important sub systems in a step and scanner, the accuracy of its positioning and synchronizing has reached nanometer level. If the gas bearing used in the stage is not well designed, micro- vibration will take place, which makes the stage system lose its accuracy. This paper analyzes the cause of micro - vibration and presents anti - vibration measures.
出处
《制造技术与机床》
CSCD
北大核心
2005年第11期47-49,共3页
Manufacturing Technology & Machine Tool
关键词
扫描型光刻机
工件台
气浮轴承
微振动
Step and Scanner
Stage System
Gas Bearing
Micro- vibration
