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非球面光学零件研磨中安装倾斜误差的影响 被引量:3

Effecting of inclining error in installing to the optical aspheric surface work-piece in the lapping
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摘要 针对研磨中工件的安装倾斜误差,提出了导致工件面形误差的分析方法,建立新、原坐标系,应用坐标变换,推导出工件曲线上各点相对理想曲线对应点的误差模型。工件安装倾斜角度不同、形状及精度要求不同导致的面形误差不同,利用模型分析了这几种情况对面形误差的影响,工件面形误差随安装倾斜角度的增大而增大,当安装倾斜角度由0.1°~1°变化时,工件面形负误差由-0.0030mm增大到-0.0448mm,增加了一个数量级;工件面形误差沿着曲面中点向边缘逐渐增大;相同的安装倾斜角度对大陡度曲面的面形误差影响较大。因此,在研磨中等精度要求的工件时,安装倾斜角度不应超过0.1°,陡度参数不应小于100mm。 In view of the inclining error in installing to the work-piece in lapping, an analytic method for profile error is presented, new and old rectangular coordinates are established, and error model of work-piece between its actual and ideal curve is deduced through coordinate transform, The profile error of the work-piece varies with the inclining angle, the profile and precision of the work-piece, so the effect on the profile error above several instances is analyzed on the basis of the error model. The profile error ofworkpiece increases with the addition of inclining angle. When the inclining angle change from 0.1 ° to 1°, the negative error of the workpiece increases from -0.0030mm to -0.0448mm to a quantity grade and the profile error increases gradually from the curved surface's center to the edge. The influence with great steepness curved surface is bigger than that with the small steepness curved surface. Hence, the inclining angle should not exceed 0.1° and the value of steepness parameter should be not less than 100ram for the workpiece of middling precision in lapping.
出处 《光电工程》 EI CAS CSCD 北大核心 2006年第4期111-114,共4页 Opto-Electronic Engineering
基金 国家自然科学基金资助项目(50375021) 吉林省科技发展计划应用基础项目(20040515)
关键词 非球面加工 研磨 倾斜误差 面形精度 Aspheric processing Lapping Inclining error Surface shape accuracy
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