Ba(Zr_(0.3)Ti_(0.7))O_3铁电薄膜的制备

Technology of Preparing Ba(Zr_(0.3)Ti_(0.7))O_3 Ferroelectric Thin Film

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摘要介绍了用溶胶-凝胶法(sol-gel)在Pt/Ti/SiO2/Si衬底和石英衬底上制备Ba(Zr0.3Ti0.7)O3铁电薄膜的基本原理、工艺过程及工艺特点;Sol-gel制备的Ba(Zr0.3Ti0.7)O3铁电薄膜表面平整、厚度均匀. The essential principle, technology process and advantages of the Ba（Zr0.3Ti0.7）O3 （BZT） ferroelectric thin films have been grown on Pt/Ti/SiO2/Si substrates and quartz substrates, which prepared by sol-gel processing are introduced. BZT thin films show smooth surface morphology and well distributed thickness.

作者张红燕翟继卫张军

机构地区新疆大学物理系同济大学功能材料研究所

出处《新疆大学学报（自然科学版）》 CAS 2006年第2期182-184,共3页 Journal of Xinjiang University(Natural Science Edition)

关键词溶胶-凝胶法铁电薄膜 Ba(Zr0.3Ti0.7)O3 Sol-Gel process ferroelectric thin films Ba（Zr0.3Ti0.7）O3

分类号 O469 [理学—凝聚态物理]

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新疆大学学报（自然科学版）

2006年第2期

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Ba(Zr_(0.3)Ti_(0.7))O_3铁电薄膜的制备

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