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Al含量对电弧离子镀共沉积Ti_(1-x)Al_xN涂层性能的影响 被引量:15

Effect of Al Content on Properties of Ti_(1-x)Al_xN Coatings Deposited by Cathodic Arc Evaporation with Independent Ti and Al Targets
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摘要 利用扫描电镜、X射线衍射仪、显微硬度计、划痕仪、磨损实验仪等,研究了不同铝含量的Ti1-xAlxN涂层性能。结果表明:当铝含量约为52%时,经涂层处理试样的显微硬度、摩擦磨损性能都得到了很大的提高,能达到使用钛铝合金靶离子镀Ti1-xAlxN涂层的相应性能,而从经济性来说,利用独立钛、铝靶比钛铝合金靶制备Ti1-xAlxN涂层的成本要低得多,从而具有降低生产成本,提高生产效益的优势。 Microstroctures, vickers hardness, bonding strength and wear resistance of the coatings wore charactcrizd by SEM, XRD, micro-indentation, scratch and pin-on-disc wear testers. The results show that the micro-hardness is largely increased but the friction coefficient is quietly decreased at the 52% of Al content in the coatings. No distinct differences in comparison with the Ti-Al alloy target deposition on the properties are detected .In the economical aspects, the cost of Ti1-xAlxN deposition with independent Ti and Al targets is much lower than it with Ti-Al alloy target. Therefore, the production cost is decreased.
出处 《热加工工艺》 CSCD 北大核心 2006年第8期4-6,共3页 Hot Working Technology
基金 国家自然科学基金资助项目(90205001)
关键词 电弧离子镀 高速钢 TIALN涂层 cathodic arc evaporation high-speed steel TiAlN coatings
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