摘要
概述了步进扫描光刻机运动系统的结构和开放式数控系统的特点;以PMAC运动控制器为核心,搭建了光刻机隔振试验台。详细分析了其控制系统的硬件结构和部件的选型,介绍了伺服系统PID参数的整定方法,最后讨论了如何利用系统软件实现同步控制要求。
Summarized the structure of the step＆scan lithography＇ s motion system and the characteristics of open CNC; Taking the PMAC motion controller as the core, designed a vibration isolation stage for the lithography; Analyzed the hardware＇ s structure and how to choose the components of the control system in details; Introduced the method to calibrate the PID parameters. And discussed how to realize the synchronizing control by using system＇ s software in the end.
出处
《微计算机信息》
北大核心
2006年第05S期40-42,9,共4页
Control & Automation
基金
国家自然科学基金资助项目(50390064)
上海市科委联合资助项目
