摘要
通过检测原子团离于MCs+和MAs－（M是基体元素）对AlxGa1-xAs基体组分进行了定量的分析，考察了MIQ－156SIMS上所测这些原子团离子的能量分布及其对分析结果的影响，并对正、负SIMS测量方法做出比较。
Quantification of AlxGa1-xAs matrix compositions by detecting MCs+ and MAs- clusterions (M is matrix element)using SIMS is studied in this paper. Energy distributions of cluster ions andtheir influence on the analysis results have been investigated. The two methods based on positive SIMS andnegative SIMS have been compared.
出处
《真空科学与技术》
CSCD
1996年第5期316-322,共7页
Vacuum Science and Technology
基金
国家自然科学基金!69376006
关键词
二次离子质谱
基体组分
定量分析
原子团离子
Secondary ion mass spectrometry, Al_xGa_(1-x)As, Matrix composition, Quantification
