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聚对二甲苯膜老化的研究进展 被引量:6

Development of the Research on Parylene Membrane Aging
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摘要 介绍了聚对二甲苯(Parylene)薄膜在热、紫外光和γ射线中的老化行为及产物,讨论了一些老化现象的机理,提出了今后需要加强研究的方向。Parylene抗辐射能力最强,而抗紫外线能力最差,其老化主要表现在亚甲基的氧化与断裂。在125℃左右,开始出现较明显的热氧化,氧化速率与温度的关系符合Arrhenius关系式;在300nm的紫外光照射下发生较明显的降解,-Cl的存在对光解有加速作用;在空气气氛中,当γ辐照剂量超过50kGy后Parylene 将发生明显的氧化,其耗氧量与辐照剂量近似呈线性关系,而且薄膜的熔融温度下降,透湿系数提高。 The aging characteristics of parylene membrane under the atmospnere of heat, ultraviolet light and gamma-ray are introduced. The aging mechanism and products are discussed. At last, the further research directions are put forward. Parylene membrane has better antiaging ability under the atmosphere of heat than that under ultraviolet light, but worse than that under gamma-ray. Oxidation of methylene is the main behavior in the parylene's aging process. Obvious oxidation occurs when paraylene is heated to 125℃. The relationship between the oxidation rate and the temperature agrees well with Arrhenius' equation. Under the irradiation of ultraviolet light (wave length of 300nm), obvious photodegradation occurs and the rate of photodegradation is accelerated by -Cl. Obvious oxidation also appears when parylene is irradiated by gamma-ray (D〉50kGy) in air, and it has a linear relationship between oxygen consumption and irradiation dose. The melting temperature of gamma-ray irradiated parylene membrane decreases, whereas the water vapor transmission modulus increases.
出处 《材料导报》 EI CAS CSCD 北大核心 2006年第5期54-58,共5页 Materials Reports
关键词 聚对二甲苯 热老化 紫外光老化 辐射老化 parylene membrane, heat aging, UV-light aging, gamma-ray aging
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参考文献28

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