摘要
介绍了在位相测量轮廓术中的一种相位修正及系统参数标定的新方法。对参考面(标定面)上点的位置_相位关系进行全场拟合,并根据该相互关系对参考面相位进行修正,能够非常有效地去除相位误差;提出的参数标定方法能精确得到投影系统参数的组合。实验证明了此方法具有良好的实用性和测量精度。
A method of phase correcting and system parameters calibrating was introduced. With the application of this phase correcting method, the relationship between the position and phase of a point can be obtained easily, which can be used to amend the phase of the reference plane （or calibration plane）. After the correcting, phase noise of the reference plane （or calibration plane） can be reduced evidently. Several combinations of system parameters are u~ to calibrate the system, which makes it easy to work out the height of the object. Experiment show that this method has good practicability and accuracy.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2006年第3期422-424,427,共4页
Optical Technique
关键词
位相测量轮廓术
相位修正
抑制噪声
系统标定
phase measurement profilometry
phase correcting
noise reduction
system calibration
