摘要
本文运用CFD技术作为辅助工具对一ISO5级洁净室内的气流组织进行设计。我们采用CFD技术对光刻胶研发实验室内的气流组织和微尘污染进行了研究。研究中采用了k-ε模型,并用FLUENT软件进行求解。对多种洁净室的气流组织方案进行了数值模拟,并选择优化方案建造了实验室,对此实验室测试了多组数据并与数值模拟的结果进行比较,表明数值模拟的结果是准确的。说明了CFD技术是洁净室设计的可靠辅助工具。
This paper illustrates how to use the CFD method as an assistant tool to design an class ISO5 cleanroom. The CFD method is used to study the airflow pattern and cross-contamination in a photo resistance research lab. The Reynolds-averaged Navier-Stokes equations governing the flow are solved using a finite-volume code FLUENT. Many plans were established for the cleanroom and these plans were simulated through the CFD. From the numerical results, a best plan was chosen and the lab. was established. Many testing data was obtained in the lab and the simulated data compared with these testing data and it＇s been concluded that the CFD method is a good tool to help design cleanrooms.
出处
《洁净与空调技术》
2006年第2期7-11,共5页
Contamination Control & Air-Conditioning Technology
