Nickel-disilicide-assisted excimer laser crystallization of amorphous silicon
被引量：1
Nickel-disilicide-assisted excimer laser crystallization of amorphous silicon
基金
Project supported by the National High Technology Development Program of China （Grant No 2002AA303250） and by the National Natural Science Foundation of China （Grant No 60576056）.
关键词
多晶硅
受激准分子激光器结晶
结晶化
界面晶粒生长
polycrystalline silicon, excimer laser crystallization, Ni-disilicide, Ni-metal-induced lateral crystallization, two-interface grain growth
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