摘要
阐述了精密气垫式隔振平台的主动阻尼关键技术之一的低频微振动测量问题,着重分析了压电传感器在低频、微幅振动测量的条件下的电荷变换单元的电路参数,并介绍了实际研究结果及其在上述主动阻尼系统中的使用效果。
It introduced the measurement of low-frequency and weak vibration in active damping of pneumatic isolation platform, and mainly studied the requirement for piezoelectric sensor charge-voltage converter under the conditions of low-frequency and weak vibration and offered a set of the circuit parameters. The result and its application are also showed.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2006年第6期583-587,共5页
Chinese Journal of Scientific Instrument
关键词
隔振平台
主动阻尼
压电传感器
电荷变换
Vibration isolation table Active damping Piezoelectric sensor Charge-voltage converting
