摘要
光学技术用于精度检验、位置测量或振动分析,现已越来越具有重大的意义。在各种不同的光学方法中,干涉测量法具有分辨率高和动态范围大的优点。本文介绍的是用于工业机器人检验的激光干涉测量法。
The optical technology used in accuracy test, displacement measurement and vibration analysis has more and more importance today. There are a variety of optical methods among which the interference measurement has the advantage of high resolution and wide dynamic range. This paper introduces the laser interferometer for measurement of displacement and vibration for industrial robot.
出处
《测控技术》
CSCD
北大核心
1990年第3期28-30,共3页
Measurement & Control Technology
