摘要
平面微型弹簧是微机械电子系统(MEMS)中一种常用的弹性元件,其蛄构形状的不同将显著影响其刚度系数．针对在限定空间MEMS弹簧设计这一问题,提出了对弹簧进行结构分解和替换的设计方法．基于力学中的能量法得出了其功能结构形状与刚度系数的关系;理论分析结果表明,功能结构的替换可以实现在限定空间内弹簧刚度系数的改变．用有限元分析软件进行了仿真,其结果和理论分析吻合,验证了这一设计方法的正确性．
The planar micro-spring is commonly used in MEMS, the rigidity coefficient of the spring changes with the structural form of the spring. In view of the problem how the micro-spring is designed in a limited space, the design method is proposed based on decomposation and substitution of structure of spring. The relationship between functional structural form and rigidity coefficient is studied with the energy method in applied mechanics. The results of theoretic analysis show that, the rigidity coefficient of the spring is altered in the limited space by alternating the functional structure. And it is also simulated by the finite element analysis software （FEA）. The result of the simulation tallies with the theoretic analysis, which validates the correctness of the design method.
出处
《纳米技术与精密工程》
CAS
CSCD
2006年第2期128-131,共4页
Nanotechnology and Precision Engineering
关键词
微机电系统
弹簧
功能结构
刚度系数
micro-electronic-mechanical-system （MEMS）
spring
functional-structure
rigidity coefficient
