摘要
采用微机电系统(MEMS)技术制作了悬臂梁式压电微拾振器,该技术主要包括:sol-gel法制备PZT压电膜、干法刻蚀、湿法化学刻蚀、UV-LIGA等工艺。研制的拾振器悬臂梁结构尺寸为:长2000μm,宽600μm,硅膜厚度12μm,PZT压电膜厚1.5μm,Ni质量块长600μm、高500μm。测试表明其固有频率为610Hz,适合低频振动源环境的应用。在1gn加速度谐振激励下,电压输出达562mV。
Piezoelectric-cantilever micro vibration pickup sensor was realized using micro-electronic-mechanical systems （MEMS） technique such as sol-gel, RIE dry etching, wet chemical etching, UV-LIGA, The dimension of the vibration pickup is of cantilever lengthxwidth： 2 000 μm×600 μm, with silicon layer thickness 12μm, PZT layer thickness 1.5μm and the added Ni metal mass is of lengthxheight： 600 μm×500 μm, The testing results show that the natural frequency of the structure is 610 Hz, which meet the low frequency application condition well, and the voltage output is about 562 mV under 1 g. resonant vibration drive.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2006年第7期69-71,共3页
Electronic Components And Materials
基金
国家"863"计划资助项目(2004AA404260)
关键词
电子技术
微拾振器
微机电系统
固有频率
电压输出
electronic technology
micro vibration pickup sensor
MEMS
natural frequency
voltage output
