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CO_2激光雕刻机的折/衍混杂f-θ镜设计 被引量:3

Design of hybrid refractive-diffractive f-θ lens working on CO_2 laser drilling system
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摘要 以工作于CO2激光主波长的传统两片球面透镜型f-θ镜为基础,引入衍射面实现消色差,设计了工作于可调谐CO2激光的波段范围9.0 ̄11.0μm的f-θ镜。结果表明,所设计的折/衍混杂f-θ镜不仅很好地工作在所要求的波段范围内,而且单色像差比原单波长f-θ镜有所提高,像面上的光斑在各个波长和视场上大小均匀。系统像差在各个波长上都接近或达到衍射极限,具有精确的光学扫描特性。 Based on a conventional 2-element f-θ lens working on the primary wavelength of CO2 laser, an achromatic f-θ lens working on tunable CO2 laser 9.0-11.0 μm was designed by adding a diffractive surface to one of the two lenses. It was shown that the designed hybrid refractive-diffractive f-θ lens could work perfectly on the required wavelength range. The monochromatic aberrations increased as compared with the conventional f-θ lens, and the spot size for each wavelength and each field of view on the image surface was uniform. The aberrations of the system on each wavelength were near, or reached the diffraction limit, and the f-θ lens could work in a scanning system with perfect accuracy.
出处 《红外与激光工程》 EI CSCD 北大核心 2006年第3期351-353,358,共4页 Infrared and Laser Engineering
基金 国家自然科学基金资助项目(60277021)
关键词 光学设计 f-θ镜 折/衍混杂 消色差 Optical design f-θ lens Hybrid refractive-diffractive Achromatic
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参考文献8

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二级参考文献13

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