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N_2O为氧源金属有机化学气相沉积生长ZnO薄膜的光学性能研究 被引量:5

Optical Properties of ZnO Thin Film Grown by Atmospheric Pressure-Metal Organic Chemical Vapor Deposition Using N_2O as Oxygen Precursor
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摘要 采用常压金属有机化学气相沉积(AP-MOCVD)技术、三步生长法,分别以H2O和N2O为氧源,DEZn为Zn源,N2作载气,在c-Al2O3衬底上生长出了晶体质量较好的ZnO薄膜。用X射线双晶衍射(DCXRD)和光致发光谱对ZnO薄膜的结晶性能和光学性质进行表征。结果显示,ZnO倾斜对称面(10-12)的ω扫描半峰全宽为350″,表明ZnO薄膜结晶性能良好;低温10 K光致发光谱结果表明,N2O为氧源生长的ZnO膜和H2O为氧源生长的ZnO膜的发光特性明显不同,没有观察到与氢有关的中性施主束缚激子对应的3.331 eV双电子卫星峰(TES)。这一结果表明,用N2O为氧源生长的ZnO薄膜中不易引进氢杂质。 High-quality ZnO films were grown on c-Al2O3 substrate by atmospheric pressure-metal organic chemical vapor deposition technique, using a method of three-step growth. DEZn and H2O were used as the Zn and O precursors in both the low and high temperature N2 buffers and N2O was used as O precursor in the main ZnO layer. The full width at half maximum (FWHM) of the inclined symmetrical plane (10-12) ω-scan of the ZnO film by double crystal X-ray diffraction method was 350", indicating the high crystal quality of the ZnO film. Compared with the 10 K low temperature photoluminescence spectra of the H2O-grown ZnO sample, the two-electron satellite peak caused by the hydrogen related neutral donor trapping excition disappeared in that of the N2O-growth ZnO sample. It indicated that hydrogen was not easily introduced into the N2O-growth ZnO film.
出处 《光学学报》 EI CAS CSCD 北大核心 2006年第7期1112-1114,共3页 Acta Optica Sinica
基金 国家863计划纳米专项课题(2003AA302160) 电子信息产业发展基金资助课题
关键词 薄膜光学 双电子卫星峰 光致发光 常压有机金属化学气相沉积 ZNO N2O thin films optics two-electron satellite photoluminescence atmospheric pressure-metal organic chemical vapor deposition ZnO N2O
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  • 1张宇,王刚,崔一平,翁健,马懿,徐岭,徐骏,陈坤基,张海黔,顾宁.氧化锌薄膜的电化学沉积法制备及受激发射研究[J].中国激光,2004,31(1):97-100. 被引量:13
  • 2Yefan Chen, Hang-Ju Ko, Soon-Ku Hong et al.. Morphology evolution of ZnO (000-1) surface plasma assisted molecular beam epitaxy[J]. Appl. Phys. Lett. , 2002, 80(8) : 1358-1360
  • 3王金忠,杜国同,王新强,闫玮,马燕,姜秀英,杨树人,高鼎三,Chang R P H.退火对ZnO薄膜结构及发光特性的影响[J].光学学报,2002,22(2):178-180. 被引量:10
  • 4贺洪波,易葵,范正修.ZnO薄膜的光学性质研究[J].光学学报,1998,18(6):799-802. 被引量:12
  • 5B. P. Zhang, N. T. Binh, K. Wakatsuki et al.. Lowtemperature growth of ZnO epitaxial films by metal organic chemical vapor deposition[J]. Appl. Phys. A, 2004, 78(1): 25-28
  • 6A. Dadgar, N. Oleynik, D. Forster et al.. A two-step metal organic vapor phase epitaxy growth method for high-quality ZnO on GaN/Al2O3 (0001) [ J ]. J. Crystal Growth, 2004, 267 ( 1 - 2) :140-144
  • 7N. Oleynik, M. Adam, A. Krtschil et al.. Metal organic chemical vapor phase deposition of ZnO with different Oprecursors[J]. J. Crystal Growth, 2003, 248:14 -19
  • 8D. G. Thomas. The exciton spectrum of zinc oxide[J]. J.Phys. Chem. Solids, 1960, 15(1-2): 86-96
  • 9D. G. Thomas. The exciton spectrum of zinc oxide[J]. J.Phys. Chem. Solids, 1960, 15(1-2): 86-96
  • 10Li Wang, Yong Pu, Wenqing Fang a al.. High-quality ZnO films grown by atmospheric pressure metal-organic chemical vapor

二级参考文献30

  • 1李文范,刘秀英.非加热气敏元件气敏机理研究[J].材料研究学报,1994,8(4):352-355. 被引量:2
  • 2Chang S J,J Vac Sci Technol A,1995年,13卷,2期,381页
  • 3刘恩科,半导体物理学,1994年,260页
  • 4王豪,光学学报,1988年,8卷,12期,1115页
  • 5D. M. Bagnall, Y. F. Chen, Z. Zhu et al.. Optically pumped lasing of ZnO at room temperature [J]. Appl. Phys. Lett. ,1997, 70(17):2230-2232.
  • 6S. Peulon, D. Lincot. Cathodic electrodeposition from aqueous solution of dense or open-structured zinc oxide films [J]. Adv.Mater., 1996, 8:166-169.
  • 7M. lzaki, T. Omi. Transparent zinc oxide films prepared by electrochemical reaction[J]. Appl. Phys. Lett. , 1996, 68( 17):2439-2440.
  • 8B. Canava, D. Lincot. Nucleation effects on structure and optical properties of electrodeposited zinc oxide on tin oxide [J].J. Appl. Electrochem. , 2000, 30:711-716.
  • 9R. Swanepoel. Determination of the thickness and optical constants of amorphous silicon [J]. J. Pkys. E, 1983, 16(12):1214-1222.
  • 10H. Cao, Y. G. Zhao, S. T. Ho et al.. Random Laser action in semiconductor powder [J]. Phys. Rev. Lett., 1999, 81(11):2278-2281.

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