摘要
利用自制微摩擦及粘附力测试装置考察了在微载荷条件下，相对湿度对Si（100）材料表面粘附力的影响，分析了在大气环境中水分子的毛细作用力和范德华力对粘附力的贡献，并以BET吸附模型为基础推导出考虑湿度影响的粘附力计算公式．结果表明：在微载荷条件下，相对湿度对材料表面的粘附力影响十分显著，随着相对湿度升高粘附力增加，特别是相对湿度RH在40％～80％之间时，粘附力变化最为显著；当相对湿度RH小于20％时，范德华力大于水的毛细作用力且占主导地位；当相对湿度RH大于20％后，水分子的毛细作用力不断增加，同时范德华力因水膜的存在而降低，水的毛细作用力占主导地位．
Effects of relative humidity on surface adhesion force of Si （100） wafer were studied under micro-scale loads using a self-buih apparatus. Based on BET adsorption model, a formula was built to calculate adhesion force, which includes the contribution of capillary force of water film and Van der Waals force under different relative humidity. The test results indicated that adhesion force ascended with the relative humidity. Under lower relative humidity （less than 20% ）, its influence on adhesion force was not significant. When the relative humidity varying from 40% to 80%, adhesion force demonstrated a remarkable increase with the humidity, and reached to a relatively stable value at higher relative humidity of 90%.
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2006年第4期295-299,共5页
Tribology
基金
国家自然科学基金资助项目(50475012)
国家重点基础研究发展计划973项目资助(2002CB716201)
关键词
粘附力
相对湿度
毛细力
范德华力
adhesion force, relative humidity, capillary force, Van der Waals force
