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碰摩微转子系统非线性动力特性研究 被引量:1

NONLINEAR DYNAMIC CHARACTERISTICS ANALYSIS OF MICRO-ROTOR SYSTEM WITH RUB-IMPACT
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摘要 微型旋转机械是MEMS(micro-electro-mechanical system)中的主要驱动之一,微转子作为系统的主要驱动部件,其动力学特性直接影响整个系统的稳定性和可靠性。文中以Jeffcott微转子系统为研究对象,建立微转子系统的碰摩力学模型和系动微分方程,应用现代非线性和转子动力学理论,以偏心量为分岔参数分析微转子碰摩时的振动响应与非线性动力特性,并以实验结果讨论偏心量对微转子系统动力特性的影响。 Rotation micro-machinery is an important power MEMS(micro-electro-mechanical system) and micro-rotor is the main driving component of the system. Dynamic characteristics of the rotor affect the stability and reliability of the whole system directly. A general model of a Jeffcott micro-rotor system with rub-impact is established based on the classic impact theory and is analyzed by the modem nonlinear dynamics and rotordynamic theories. An investigation is carried out on the vibration responses and dynamic characteristics of the rotor system with rub-impact and the results provide a better understanding of the dynamical characteristics, such as the transition among periodic, quasi-periodic and chaotic responses. In addition, the experiment results are provided to discuss effects of eccentricity of the rotor on the whole system. The results help engineers to optimize the design of micro-rotating machinery in MEMS, as well as to develop sensitive monitoring/diagnosis systems assessing machinery conditions.
出处 《机械强度》 EI CAS CSCD 北大核心 2006年第4期475-479,共5页 Journal of Mechanical Strength
基金 国家杰出青年基金项目(10325209) 国家自然科学基金项目(50575132)资助~~
关键词 微机电系统 微转子 碰摩 分岔 Micro-electro-mechanical system(MEMS) Micro-rotor Rub-impact Bifurcation
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参考文献12

  • 1孙克豪,钱劲,张立宪,余同希,赵亚溥.MEMS器件的计算机辅助设计与模拟[J].机械强度,2001,23(4):488-494. 被引量:8
  • 2张文明,孟光,周健斌.静电微电机及其可靠性分析[J].机械强度,2005,27(1):50-56. 被引量:2
  • 3Bart S F, Mehregany M, Tavrow L S, Lang J H, Senturia S D. Electric micromotor dynamics. IEEE Transactions on Electron Devices, 1992,39(3): 566 - 575.
  • 4Epstein A H. Millmeter-scale, MEMS gas turbine engines. In:Proceedings of ASME Turbo Expo 2003 Power for Land, Sea, and Air,Atlanta, Georgia, USA, June 16 - 19, 2003, 1 - 28.
  • 5Deng K, Ramanathan G P, Mehregany M. Micromotor dynamics in lubricating fluids. J. Micromech. Microeng., 1994, 4:266 - 269.
  • 6Piekos E S, Breuer K S. Pseudo-spectral orbit simulation of non-ideal gas-lubricated journal bearings for microfabricated turbomachines.Journal of Tribology, 1999, 121:604 - 609.
  • 7Frechette L G, Jacobson S A, Breuer K S, et al. High-speed microfabricated silicon turbomachinery and fluid film'bearinigs. J.Microelectromech. Syst., 2005, 14(1): 141 - 152.
  • 8余寿文.微电子机械系统的几个力学问题[J].机械强度,2001,23(4):380-384. 被引量:9
  • 9Beerschwinger U, Reuben R L, Yang S J. Frictional study of micromotor bearings. Sens. Actuators A, 1997, 63:229 - 241.
  • 10Zhang W M, Meng G. Contact dynamics between the rotor and bearing hub in an electrostatic micromotor. Microsystem Technologies, 2005,11:438 - 443.

二级参考文献91

  • 1余寿文.复杂微力-电系统的细微尺度力学[J].力学进展,1995,25(2):249-259. 被引量:8
  • 2余寿文.关于微系统的细微尺度力学[J].固体力学,2000,21:8-13.
  • 3Bart S F, Mehregany M, Tavrow L S, et al. Electric micromotor dynamics. IEEE Transactions on Electron Devices, 1992, 39(3): 566~575.
  • 4Van Spengen W M, Puers R,De Wolf I. A physical model to predict stiction in MEMS. J Micromech. Microeng., 2002, (12): 702~710.
  • 5Lafontan X, Dufaza C, Perez G, Pressecq F. MEMS physical analysis in order to complete experimental results return. Design Test Integration and Packaging of MEMS/MOEMS Symposium, Paris,France,2000. 236~243.
  • 6Dhuler V R, Mehregany M, Phillips S M, Lang J H. A comparative study of bearing designs and operational environments for harmonic side-drive micromotors. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot, IEEE,Travemunde, Germany,1992. 171~176.
  • 7Komvopoulos K. Surface engineering and microtribology for microelectromechanical systems. Wear, 1996, 200: 305~327.
  • 8Chapman P L,Krein P T. Smaller is better Micromotors and electric drives.Industry Applications Magazine, IEEE, 2003, 9(1): 62~67.
  • 9Fujita H. Microactuators and micromachines. Proceeding of IEEE, 1998, 86(8):1 721~1 732.
  • 10Alladi D J, Nagy M L,Gaverick S L. An IC for closed-loop control of a micromotor with an electrostatically levitated rotor. Proceeding of IEEE International Symposium on Circuits and Systems, 1999, 6(30): 489~492.

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