摘要
在现有理论的基础上,设计出一种新型的AFM工作台扫描控制电路。介绍了该电路的设计思想,与现有的AFM控制系统相比,X、Y方向的运动采用闭环控制,提高了控制精度。文中还介绍了一种简单实用的PI调节电路,该电路具有结构简单、成本低、功耗小和控制精度高等优点。
On the basis of existing theories, a new type scanning control circuit is designed. The design idea of the circuit is introduced. Compared with existing AFM control system, a closed loop is applied to control the movements of Direction X and Y, and the control precision is improved. A practical circuit for adjusting the parameter of PI is also introduced. The designed circuit has such capabilities as simple structure, low cost, low power and high control precision.
出处
《机械工程师》
2006年第8期53-55,共3页
Mechanical Engineer
