摘要
主要研究了静电激励/电容拾振谐振式硅微加速度传感器的同频干扰问题,分析了几种干扰源,建立了同频干扰的电路等效模型,提出一种基于双端激励/双端检测的结构,采用二次差分的方式消除同频干扰。
The research on the same frequency disturbance for the electrostatically excited and capacitive detected resonant beam accelerometer is introduced. Several kinds of sources of disturbance are considered and the equivalent circuit model is proposed. A method based on differential design to tackle this problem is put forward.
出处
《测控技术》
CSCD
2006年第8期5-6,10,共3页
Measurement & Control Technology
关键词
微机械电子系统
微谐振式传感器
同频干扰
双端激励/差分检测
MEMS
resonant microsensor
disturbance of the same frequency
double-side excitation and differential detection
