摘要
针对分立元件电路噪声与干扰大的特点,设计了基于调制解调方法的微加速度计闭环检测系统,详细介绍了该闭环检测系统的原理框图及实现方法,讨论了该闭环检测系统的数学模型,并且利用精密转台对该微加速度计的性能进行了测试,测试结果表明,该微加速度计测量线性度为2.5%,量程为±1g,刻度因子为3V/g。
This paper introduces the design of closed-loop detection system for microaccelerometer, which is realized on a circuit composed by separate component with great noise. The principle and configuration of the closed-loop detection system are presented. The math model of the closed-loop detection system is discussed. The performance of the MEMS accelerometer is tested on a rotating floor, The test result shows that the measuring linearity of the microaccelerometer is 2.5 %, the measuring range is 4-1 g, and the scale factor is 3 V/gn.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第4期1097-1099,1156,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金资助(50375154)
关键词
微加速度计
MEMS
闭环检测
调制解调
microaccelerometer
MEMS
closed-loop detection
modulation and demodulation
