摘要
氧传感器是最重要的化学传感器之一.它与生物酶固定化技术相结合可制成多种生物传感器.由于集成电路工艺和微机械加工技术的发展,Clark氧传感器的微型化已取得了突破性的进展.本文对这一进展作了综述.
Oxygen sensors is one of the most important chemical sensors. Many biosensors were fabricated by immobilizing a special enzyme on the sensitive area of the oxygen sensor. An important progress on the microminiaturization of Clark-type oxygen sensor has been made due to the application of recent micromachining technique and microelectron planar process. This paper is a review of the progress.
出处
《传感器世界》
1996年第9期5-10,共6页
Sensor World
基金
中国科学院传感技术国家重点实验室资助课题
