摘要
用Bruggeman模型理论,分析了氧化多孔硅/聚合物复合膜的等效折射率与多孔硅孔隙率、氧化度和嵌入率的关系.实验研究了嵌入PMMA材料的氧化多孔硅/聚合物膜的等效折射率.证实了在多孔硅中嵌入聚合物可使薄膜的光学参量保持稳定.
The dependence of effective refractive index on polymer fraction of oxidized porous silicon films with various initial porosities and oxidation degree was given by Bruggeman effective medium model. The effective refractive index of oxidized porous silicon inserted polymer PMMA composite films was studied in experiment. It found experimentally that polymer inserted into pores of porous silicon can enhance the stability of optical parameters of the film.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2006年第8期1149-1152,共4页
Acta Photonica Sinica
基金
国家自然科学基金(60267001)
中国科学院"西部之光"
新疆优秀青年学者奖励计划(XJEDU2004E02)资助项目
关键词
氧化多孔硅
聚合物
复合膜
折射率
Oxidized porous silicon
Polymer
Composite film
Refractive index